S.M.A.R.T. Laboratory

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The Center for the
  Strategic Applications of Nuclear Sensors

Equipment
and Capabilities

Scroll down to see a listing of the lab's equipment...

What is the S.M.A.R.T. Laboratory?

At its previous location situated in an empty cyclotron bay at the University of Michigan, Dr. Douglas S. McGregor created the S.M.A.R.T. Laboratory in November 1998. The entire S.M.A.R.T. Laboratory was moved to Kansas in May 2002 when Professor McGregor accepted a faculty position at Kansas State University. Completely moved and rebuilt, the S.M.A.R.T. Laboratory has the necessary equipment to design, fabricate, test, package, and deploy a variety of custom radiation detectors. Although much of the research involves semiconductors, including growth, characterization, design, and device fabrication, other projects ongoing in the S.M.A.R.T. Laboratory involve development of gas-filled detectors, scintillation detecting materials, radiation measurements, and neutron activation analysis. Novel radiation detectors are always under development at the KSU S.M.A.R.T. Laboratory, such as geometrically weighted Frisch grid detectors, Frisch-collar CdZnTe detectors, micro-pocket fission detectors (MPFD), microstructured semiconductor neutron detectors (MSND), GaAs self-biased low power neutron detectors, and pixelated semiconductor neutron imaging detectors. Fourteen patents have been awarded to S.M.A.R.T. Laboratory researchers for various detector designs with several more patents still pending. Students and faculty using the S.M.A.R.T. Laboratory have generated over 180 scientific publications. S.M.A.R.T. Laboratory researchers have also been the recipients of three R&D 100 awards for the years of 2005, 2009, and 2014.

S.M.A.R.T. Laboratory research has been supported with funds supplied from the National Science Foundation, the U.S. Department of Defense through DTRA, Sandia National Laboratories, Lawrence Livermore National Laboratory, Spire Corporation, Radiation Safety Engineering, Inc., Instrumentation Associates, Lockheed-Martin, Argonne National Laboratories, and the U.S. Department of Energy through the NERI and the NEER programs, and through the National Nuclear Security Administration (NNSA). The rapid growth of the laboratory has also been assisted by equipment donations from Sandia National Laboratories, Lawrence Livermore National Laboratory, IBM Corporation, Science Applications International Corporation (SAIC), Knolls Atomic Power Laboratory, MOXTEK, Inc., Renaissance Instruments, University of Michigan, Cornell University and Northrup Grumman.

The S.M.A.R.T. Laboratory at Kansas State University

The SMART Laboratory equipment includes an assortment of semiconductor processing equipment, including a linear drive diamond cutting wheel, a diamond wire saw, a precision slurry saw, a wafer dicing saw, precision lapping and polishing machines, a custom chemo-mechanical polishing system, a custom 6-pocket e-beam evaporator, a 4-pocket evaporator, two dual filament evaporators, an ion mill, a vacuum annealing chamber, a fission chamber plating station, mask aligners, microscopes, ovens, grinders, and an assortment of various furnaces for annealing, sintering, diffusions, and oxidations. Further, the SMART Laboratory has numerous crystal growth furnaces that actively being used to grow CdZnTe, LaBr3, and HgI2 crystals for radiation detector development, which include 40 horizontal and 10 vertical HgI2 vapor transport furnaces, 4 high pressure vertical Bridgman furnaces, two low pressure vertical Stockbarger furnaces, three zone melt furnaces, 1 vapor transport purifying furnace, and 1 GaAs LPE furnace. Central to the SMART Laboratory is a 1200 sq ft class-100 clean room where radiation detectors are fabricated. The SMART Laboratory also has 300 sq ft class 1000 clean for crystal growth sample preparation. Detectors are built from start to finish in readily deployable packages. The SMART Laboratory is equipped a scanning electron microscope, Auger electron analyzing system, IV and CV tracers, ellipsometer, probers, radiation sources and NIM electronics to test and characterize radiation detectors and materials. The facility is available to students and faculty for research and development of devices requiring standard equipment for VLSI processing and device fabrication. Over 90 undergraduate and graduate students have worked in the SMART Laboratory.

Equipment List

Analysis Equipment
   Auger Analysis System (95 Kb)
   Automated Probe Station (37 Kb)
   Bruker D2 CRYSO X-Ray Diffraction System (82 Kb)
   Bruker D8 DISCOVER X-Ray Diffraction System (193 Kb)
   CV Analyzer (91 Kb)
   Compton Scatter Coincidence System (66 Kb)
   DekTak III Profilometer (39 Kb)
   Ellipsometer (43 Kb)
   Faraday Cage (137 Kb)
   Four Point Probe (31 Kb)
   Germanium Gamma Ray Spectrometers (134 Kb)
   Hitachi Scanning Electron Microscope (219 Kb)
   Keithley IV Curve Tracer (91 Kb)
   Manual Probe Station (85 Kb)
   Neutron Diffractometer (291 Kb)
   Photoluminescence Spectrometer
   TN Technologies Spectrace X-Ray Analyzer
Annealer
   Annealing Chamber (112 Kb)
Clean Rooms
   Class-100 Clean Room (359 Kb)
   Class-1000 Clean Room (2 Mb)
Deposition Equipment (Evaporators, Sputtering, Plating)
   CVC Resistive Evaporator (93 Kb)
   Carbon Sputtering System (35 Kb)
   Dual 6-pocket Electron Beam and Resistive Evaporation System (92 Kb)
   Low Pressure Condensation Deposition System (125 Kb)
   Parylene Coating System (87 Kb)
   RF DC Sputtering System (164 Kb)
Dry Etching
   Branson Plasma Asher (74 Kb)
   LFE Plasma Asher (48 Kb)
   Millitron Ion Mill (90 Kb)
   Plasma Lab ICP-RIE (259 Kb)
Hoods and Benches
   Chemical Processing Bench (26 Kb)
   Dual-Sided Ultra Pure Glove Box (175 Kb)
   High Temperature Ultra Pure Glove Box (79 Kb)
   Large Clean Room (Class-100) KOH Bench (89 Kb)
   Large Clean Room (Class-100) Solvent Benches (282 Kb)
   Large Clean Room (Class-100) Wet Benches (310 Kb)
   Materials Preparation and Polishing Hoods (177 Kb)
   Sample Preparation Glove Boxes (99 Kb)
   Small Clean Room (Class-1000) Wet Hood (38 Kb)
   Ultra Pure Glove Box (55 Kb)
   Wafer Spin-Dry Washer 1 (113 Kb)
   Wafer Spin-Dry Washer 2 (97 Kb)
Mask Aligners
   Karl Suss MJB-3 Mask Aligner (29 Kb)
   Karl Suss MJB-3 Scanning IR Mask Aligner (53 Kb)
   Quintel NXQ-8000 Mask Aligner (71 Kb)
Optical Microscopes
   Clean Room Inspection Microscope (64 Kb)
   Inspection Microscope (43 Kb)
   Leitz Ergolux Inspection Microscope (40 Kb)
   Nikon Inspection and Infrared Microscope (73 Kb)
Ovens and Furnaces
    High-Temperature Diffusion-Oxidation Furnaces (129 Kb)
   Carbon Coating Furnace (95 Kb)
   Crystal Specialties Liquid Phase Epitaxy (LPE) Furnace (35 Kb)
   Electro-Dynamic Gradient Furnaces (59 Kb)
   Four-Stack High-Temperature Diffusion-Oxidation Furnaces (265 Kb)
   HgI2 Horizontal Crystal Growth Furnaces (177 Kb)
   HgI2 Sublimation Purification Furnace (41 Kb)
   HgI2 Vertical Crystal Growth Furnaces (43 Kb)
   High Pressure Reaction Furnace (53 Kb)
   High Pressure Vertical Bridgman Furnace (87 Kb)
   High-Temperature Resistive Furnace (68 Kb)
   LaBr3 Process and Purification Furnace. (44 Kb)
   Lindberg High Temperature Three-Zone Furnace (99 Kb)
   Modified Horizontal Stockbarger Furnace (68 Kb)
   Modified Vertical Stockbarger Furnace (68 Kb)
   Modified Vertical Stockbarger Slant Furnace (46 Kb)
   SiC Contact Annealing Furnace (41 Kb)
   ThPbI3 Vertical Bridgman Growth Furnace. (79 Kb)
   Thermco High-Temperature Furnaces (50 Kb)
   Ultraclean Ovens (66 Kb)
   Vacuum Distillation and Zone Melting Furnaces (84 Kb)
   Zone Refining Furnace (34 Kb)
Packaging Equipment
   Soldering Station (84 Kb)
   Wire Bonder (33 Kb)
Photoresist Spinners
   Laurell Photoresist Spinner (169 Kb)
   Laurell Photoresist Spinner - 2 (32 Kb)
Polishers
   Grinding Wheels (82 Kb)
   Logitech PM2 Lapping Machine (43 Kb)
   Logitech PM2A Converted Lapping Machine (42 Kb)
   Logitech PM2A Lapping Machine (70 Kb)
   South Bay Polisher (36 Kb)
   Vacuum Sample Mounting System (46 Kb)
Radiation Detection Instruction Laboratory
   Radiation Detection Instruction Laboratory (337 Kb)
Saws
   Chemical Slicing Saw (91 Kb)
   Disco DAD Dicing Saw. (98 Kb)
   Laser-Tech Diamond Wire Saw (147 Kb)
   Logitech Diamond Wire Saw (35 Kb)
   Paxco Dicing Saw (38 Kb)
   Tempress Scriber (36 Kb)
Support Systems
   Liquid Nitrogen Supply Tank (37 Kb)
   Machine Shop (293 Kb)
   Mini Shop (99 Kb)
   Tool Room (48 Kb)
   U.S. Filter De-Ionizing System (45 Kb)
Vacuum - Gas Fill
   Multi-Station Ampoule Sealing System (239 Kb)



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Mechanical & Nuclear Engineering
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