S.M.A.R.T. Laboratory
Millitron Ion Mill
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Located in the larger class 100 clean room, the ion mill is used to etch materials with energetic ions of argon or xenon. Intricate patterns on chemically resistant materials, such as ceramics, can be produced. The system can also be used on semiconductors that have special restrictions preventing the use of reactive ion etching techniques.

Millitron Ion Mill
Millitron Ion Mill

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Mechanical & Nuclear Engineering
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