S.M.A.R.T. Laboratory
Karl Suss MJB-3 Scanning IR Mask Aligner
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Located inside the smaller S.M.A.R.T. Laboratory class 1000 clean room, the precision aligner is used for lithography patterning of photoresist for semiconductor devices. The aligner can accept 3 inch wafers and 4 inch masks. The MJB-3 IR aligner can be used to align wafer backside patterns to the front side.

Karl Suss MJB-3 IR mask aligner
Karl Suss MJB-3 IR mask aligner

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Mechanical & Nuclear Engineering
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