S.M.A.R.T. Laboratory
Ultraclean Ovens
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Located inside the S.M.A.R.T. Laboratory Clean Room, the clean room ovens are used to bake various samples during processing. For instance, the ovens are used for the hard and soft bake steps for photoresist patterning.

Ultraclean Ovens
Ultraclean Ovens

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Mechanical & Nuclear Engineering
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