S.M.A.R.T. Laboratory
Room 001 Ward - Class 100 Semiconductor Detector Fabrication Facility

The new 1000 square foot class 100 clean room facility is used to develop various semiconductor detectors, mostly from Si. The laboratory is fully operational as of March 2012.

The 6-pocket/dual filament evaporator in the vacuum process bay.
The 6-pocket/dual filament evaporator in the vacuum process bay.

Chemical processing bay in the class 100 radiation detector fabrication facility.
Chemical processing bay in the class 100 radiation detector fabrication facility.

Students operate the new mask aligner in the class 100 radiation detector fabrication facility.
Students operate the new mask aligner in the class 100 radiation detector fabrication facility.

Students operate the DC/RF sputtering system and the ICP-RIE system in the vacuum systems bay.
Students operate the DC/RF sputtering system and the ICP-RIE system in the vacuum systems bay.

The Neutronix-Quintel 8000 photoaligner is capable of proximity exposures, dual-side alignment, and fully automated alignment to existing patterns.
The Neutronix-Quintel 8000 photoaligner is capable of proximity exposures, dual-side alignment, and fully automated alignment to existing patterns.

Students operate the RF/DC sputtering system in the vacuum process bay.
Students operate the RF/DC sputtering system in the vacuum process bay.



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Mechanical & Nuclear Engineering
Manhattan, KS 66506
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