Room 141 Ward - Semiconductor Materials Analysis Laboratory (SMAL)|
The Semiconductors Materials Analysis Laboratory (SMAL), located in room 141 Ward Hall, is equipped with analytical tools to assist with the characterization of the materials and devices fabricated in the SMART Laboratory. These tools include a scanning electron microscope (SEM), and Auger electron analysis microscope, a Bruker D2 CRYSO x-ray Diffractometer and a Bruker D-8 DISCOVER x-ray diffractometer. Although the SMAL Lab is part of the SMART Lab, it is also a campus user facility that is open to all faculty and students that have been properly trained on the equipment.
The scanning electron microscope (SEM) and x-ray diffractometer in the SMAL Lab. The scanning electron microscope is used to investigate materials and surfaces at the microscopic level. It has secondary and backscatter electron imaging capability. It also has X-ray flourescence capability that allows for the identification of the elemental constituents of a substance.
The Auger electron analysis system is used to excite characteristic Auger electrons from a material surface. These Auger electrons carry unique information that allows the operator to identify surface elements. The system comes with a sputter gun that allows the user to etch the surface during analysis, thereby allowing for depth profiling of a contact or surface layer.
Ben Montag operates the Bruker D8 x-ray diffractometer,