S.M.A.R.T. Laboratory
Class-100 Clean Room
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The class 100 clean room spans 1000 square feet of working space, and is used for the development of semiconductor devices in an ultra clean environment. Class 100 corresponds to no more than 100 particles larger than 0.5 microns in any given cubic foot of air. The yellow lights are necessary to prevent exposure of photosensitive chemicals used for microscopic pattern development. The lab is separated into three working areas, those being the high-temperture bay, the wet working area bay, and the vacuum deposition bay.

Wet chemistriy working area in the class 100 clean room.
Wet chemistriy working area in the class 100 clean room.

Wet working chemistry area in the class 100 clean room.
Wet working chemistry area in the class 100 clean room.

High vacuum deposition and plasma deposition working area in the class 100 clean room.
High vacuum deposition and plasma deposition working area in the class 100 clean room.

Diffusion, oxidation and general high temperature process working area in the class 100 clean room.
Diffusion, oxidation and general high temperature process working area in the class 100 clean room.



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Mechanical & Nuclear Engineering
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