S.M.A.R.T. Laboratory
Class-1000 Clean Room
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The class 1000 clean room spans 300 square feet of working space, and is used for the development of semiconductors in an ultra clean environment. Class 1000 corresponds to no more than 1000 particles larger than 0.5 microns in any given cubic foot of air. The picture below shows how researchers must protect the room from themselves by wearing special clothing. The yellow light is required in order to keep from exposing photo-sensitive chemicals.

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Graduate and undergraduate students work together processing devices inside the clean room.
Graduate and undergraduate students work together processing devices inside the clean room.

Class 1000 clean room.
Class 1000 clean room.

Class 1000 clean room.
Class 1000 clean room.

Student operating one of the MJB3 aligners.
Student operating one of the MJB3 aligners.

Students performing wet chemistry work in the class 1000 clean room.
Students performing wet chemistry work in the class 1000 clean room.



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