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RF DC Sputtering System Return to Equipment Listing |
The RF/DC sputtering system is located in the larger class 100 clean room. It has 4 target stations and is capable of sputtering both insulating and conducting films.
The RF/DC Sputtering System
A student operates the RF/DC sputtering system.
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Mechanical & Nuclear Engineering
Manhattan, KS 66506
(785) 532-4093