S.M.A.R.T. Laboratory
Large Clean Room (Class-100) Wet Benches
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The class 100 hood is used for caustic wet chemical processing, such as with acids.

The class 100 clean room has wet benches dedicated to either acids or bases.
The class 100 clean room has wet benches dedicated to either acids or bases.

Graduate students clean and process semiconductor wafers in the wet benches.
Graduate students clean and process semiconductor wafers in the wet benches.

Cleaning and processing semiconductor wafers in the wet work bay.
Cleaning and processing semiconductor wafers in the wet work bay.



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Mechanical & Nuclear Engineering
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