Karl Suss MJB-3 Mask Aligner Return to Equipment Listing

Located inside the smaller S.M.A.R.T. Laboratory class 1000 clean room, the precision aligner is used for lithography patterning of photoresist for semiconductor devices. The aligner can accept 3 inch wafers and 4 inch masks. The MJB-3 also has custom chucks that allow for processing of thick semiconductor samples up to 1.1 cm thick.