S.M.A.R.T. Laboratory | |||
Located inside the S.M.A.R.T. Laboratory class 100 clean room, the Qunitel NXQ-8000 aligner is used for lithography patterning of photoresist for semiconductor devices. The aligner can accept up to 6 inch wafers and 6 inch masks, and is outfitted to perform front-side and back-side optical pattern alignment.
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