S.M.A.R.T. Laboratory
Room 015 Ward - Class 1000 Clean Room and Chemistry Lab

The class 1000 clean room is housed within room 15 Ward Hall. Also within room 15 Ward are the wire saws, lapping and polishing systems, chemical hoods, scribers, and purification furnaces. The clean room houses the mask aligners, ovens, wet hoods, plasma asher, several microscopes, with port access to the high temperature furnace stacks. See Laboratory Layout of Room 15 Ward.

Alireza Kargar is working with the Lasertech diamond wire saw to slice CdZnTe samples.
Alireza Kargar is working with the Lasertech diamond wire saw to slice CdZnTe samples.

A view of room 15 Ward Hall looking towards the clean room. The gowning room entrance is on the right.
A view of room 15 Ward Hall looking towards the clean room. The gowning room entrance is on the right.

A view of room 15 Ward Hall looking from the clean room towards the lapping and polishing stations.
A view of room 15 Ward Hall looking from the clean room towards the lapping and polishing stations.

Inside the SMART Lab class 1000 clean room.
Inside the SMART Lab class 1000 clean room.

Students perform chemical cleaning in the low-particle controlled environment of the SMART Laboratory class 1000 clean room.
Students perform chemical cleaning in the low-particle controlled environment of the SMART Laboratory class 1000 clean room.



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Mechanical & Nuclear Engineering
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